Robust control of micromotion system
A robust controller design for a micro motion system represented by a piezoelectric bimorph actuator is considered. The dynamic model of the piezoelectric actuator with nonlinear hysteresis is presented. The nonlinear dynamics of the actuator are first linearized using the stochastic equivalent linearization method. Then a robust controller is designed for the piezoelectric actuator system using a state space approach which guarantees stability and good performance of the controlled system. Three approaches are considered.