Magnetic Lens Aberration Coefficients Estimation by Using the Analytical Solution for the Paraxial Ray Equation
A theoretical investigation is carried out by using an analytical expression for paraxial trajectory of an electron in a magnetic lens to estimate the optimum properties of the magnetic lens.The aberration coefficients of the magnetic lens are studied, such as the spherical, chromatic, radial distortion and spiral distortion aberration coefficients. The Glaser's bell-shaped model is adopted to represent the axial field distribution of magnetic lens.