Design and construction of freeman ion source.

The design and construction of Freeman ion source which was carried out, which was used in wide fields such as ion implantation. The research was research steps: 1- first step: is the design of the ion source and manufacturing them to construct these parts 2. Second step: connecting the electrical circuit of the ion source and studying the plasma characteristics with and without magnetic field. 3- Third step: the extraction of the positive ions using a simple extraction electrode was performed. The effect of variations of the extraction voltage, are voltage and the filament current on the extraction current were studied.