Design and construction of plasma filament ion source.

number: 
197
English
department: 
Degree: 
Imprint: 
Physics
Author: 
Hind Subhi Al-Rawi
Supervisor: 
Dr. Hikmat A. Hamed
year: 
1996
Abstract:

A plasma filament type ion source (modified Freeman ion source) was designed and constmcted. This ion source has a long lifetime and it was used in many fields such as ion implantation. This research was done in four stages 1.The first stage: Design and construct all parts of this ion source. 2. The second stage: Connect the ion source electrical circuit and then operate it using Ar as a working and feeding gas in order to study the characteristics of the arc discharge in the plasma generator and ion source chamber to determine the best ion source operational conditions with and without applying a magnetic field. 3. The third'stage: Connect the Langmuir probe electrical circuit in order to study the characteristics of the flowing plasma such as, electron temperature, electron density, ion density, and ionization efficiency. 4. The fourth stage: Extract the positive ions from the arc discharge of the ion source by using a simple extractor electrode which is electrically supplied with negative bias and study the effect of the extraction voltage.on the extracted current density and their dependence on the arc discharge operational parameters, such as arc discharge voltage, arc discharge current, plasma generator current, and feeding gas pressure. The effect of the distance between the extractor electrode and the outlet slit on the extracted ion current density has been also demonstrated.